MATEC Web of Conferences
Volume 8, 2013Progress in Ultrafast Laser Modifications of Materials
|Number of page(s)||2|
|Section||Application in optofluidics and in microfabrication|
|Published online||18 November 2013|
Fabrication of Topologically-Complex 3D Microstructures by Femtosecond Laser Machining and Polymer Molding
Eindhoven University of Technology, PO Box 513, 5600 MB, Eindhoven, The Netherlands
We demonstrate the demolding of topologically complex three-dimensional elastomeric microstructures from a femtosecond laser micromachined glass substrate. Demolding success rates of >90% are achieved, which are qualitatively supported by a simple mechanical model.
OCIS codes: (220.4000) – Microstructure fabrication / (220.4610) – Optical fabrication
© Owned by the authors, published by EDP Sciences, 2013
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 2.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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