| Issue |
MATEC Web of Conferences
Volume 8, 2013
Progress in Ultrafast Laser Modifications of Materials
|
|
|---|---|---|
| Article Number | 05005 | |
| Number of page(s) | 2 | |
| Section | Application in optofluidics and in microfabrication | |
| DOI | https://doi.org/10.1051/matecconf/20130805005 | |
| Published online | 18 November 2013 | |
Ship-in-a-Bottle Biomicrochips Fabricated by Hybrid Femtosecond Laser Processing
RIKEN, Wako, Saitama, 351-0198, Japan
* e-mail: ksugioka@riken.jp
We demonstrate fabrication of highly functional biomicrochips by hybrid femtosecond laser processing. In this process, 3D microfluidic structures are first formed inside photosensitive glass by femtosecond laser direct writing followed by thermal treatment and successive chemical wet etching. Then, functional microcomponents are integrated inside the fabricated microfluidic structures by two-photon photopolyerization. We term the fabricated microchips ship-in-a-bottle biomicrochips,
© Owned by the authors, published by EDP Sciences, 2013
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