| Issue |
MATEC Web of Conferences
Volume 8, 2013
Progress in Ultrafast Laser Modifications of Materials
|
|
|---|---|---|
| Article Number | 04004 | |
| Number of page(s) | 2 | |
| Section | Process characterization and some aspects of femtosecond laser direct writing | |
| DOI | https://doi.org/10.1051/matecconf/20130804004 | |
| Published online | 18 November 2013 | |
Femtosecond laser processing of fused silica: from process characterization to applications in optomechanics
Mechanical Engineering Dpt., Eindhoven University of Technology, Netherlands
* e-mail: y.bellouard@tue.nl
Non-linear laser-matter interaction offers the possibility to structure dielectric materials in three dimensions. Among dielectrics, fused silica has brought particular attention because of its suitability for a variety of applications from optofluidics to integrated optics and from optical components to mechanics and optomechanics. Multiple aspects of this laser-matter interaction remains elusive. Here we discuss some aspects of it from the viewpoint of micromechanics.
© Owned by the authors, published by EDP Sciences, 2013
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 2.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.