MATEC Web of Conferences
Volume 8, 2013Progress in Ultrafast Laser Modifications of Materials
|Number of page(s)||2|
|Section||Process characterization and some aspects of femtosecond laser direct writing|
|Published online||18 November 2013|
Femtosecond laser processing of fused silica: from process characterization to applications in optomechanics
Mechanical Engineering Dpt., Eindhoven University of Technology, Netherlands
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Non-linear laser-matter interaction offers the possibility to structure dielectric materials in three dimensions. Among dielectrics, fused silica has brought particular attention because of its suitability for a variety of applications from optofluidics to integrated optics and from optical components to mechanics and optomechanics. Multiple aspects of this laser-matter interaction remains elusive. Here we discuss some aspects of it from the viewpoint of micromechanics.
© Owned by the authors, published by EDP Sciences, 2013
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 2.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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