MATEC Web of Conferences
Volume 32, 2015International Symposium of Optomechatronics Technology (ISOT 2015)
|Number of page(s)||7|
|Section||System fabrication using femtosecond laser processing|
|Published online||02 December 2015|
Visualization of femtosecond laser-induced stress anisotropy in amorphous and crystalline materials
1 Galatea Lab, STI/IMT École Polytechnique Fédérale de Lausanne, Rue de Maladière 71b, CH-2002 Nuechâtel, Switzerland
2 Shandong University, School of Physics, C Block, Zhixin Building, 27 Shanda Nanlu, Jinan, Shandong, 250100, China
a Corresponding author: firstname.lastname@example.org
In recent years, micro manufacturing with femtosecond lasers has received considerable attention as an efficient technique for producing three-dimensional devices, combining multiple functionalities in a single monolithic substrate. In this manufacturing process, stress-anisotropy resulting from non-ablative laser exposure can have both positive and negative effects on the process out-come. In this work, we present a simple method for visualizing stress anisotropy, combining highly symmetric laser-written patterns with polarization microscopy, as a tool for identifying the various anisotropic contributions to the laser fabrication process.
© Owned by the authors, published by EDP Sciences, 2015
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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