MATEC Web Conf.
Volume 95, 20172016 the 3rd International Conference on Mechatronics and Mechanical Engineering (ICMME 2016)
|Number of page(s)||5|
|Section||Mechanical Design-Manufacture and Automation|
|Published online||09 February 2017|
Design and Testing of a 2-DOF Flexure-based Compliant Stage
1 Mechanical Engineering Department, Tsinghua University, 100084, Beijing, China
2 Foreign Language Department, Hebei Normal University for Nationalities, Chengde, China
This paper presents the mechanical design and testing of a 2-DOF flexure-based compliant stage. The prismatic joints are first discussed. To obtain high resonance frequency and decoupled property, the stage composed of four parallel chains with symmetrical configuration should be employed. Finally, an experimental platform is set up to test the cooperative tracking performance. The experimental trajectory is in good agreement with the desired trajectory under various input frequencies. It shows that the maximum tracking error exhibits an increase from 0.8% to 2.7%. The experiment results demonstrate that the proposed compliant stage possess good tracking performance under 100 Hz, which also validates the reasonability of the stage.
© The Authors, published by EDP Sciences, 2017
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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