A Piezo-Driven Compliant Nanopositioning Stage with Large Stroke for Micro/Nano Manipulation
State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai JiaoTong University, Shanghai 200240, People’s Republic of China
This paper presents the design, analysis, and testing of a single-axis compliant nanopositioning stage with large stroke driven by piezoelectric actuator for micro/nano manipulation. In the developed stage, a hybrid displacement amplifier integrating two kinds of flexure-based input/output decoupling modules have been developed to achieve a large stroke and precise positioning. The analytical modelling and finite element analysis are given to validate the mechanical performance and a prototype of the proposed stage is fabricated for performance tests. The experimental results show that the developed stage has the travel stroke of 214 μm with a resolution of 8 nm. It is demonstrated that the stage can be adequate for micro/nano manipulation.
© The Authors, published by EDP Sciences, 2016
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