Process Parameters Optimization of 14nm MOSFET Using 2-D Analytical Modelling

¹ Centre for Micro and Nano Engineering (CeMNE) College of Engineering, Universiti Tenaga Nasional (UNITEN), 43009 Kajang, Selangor, Malaysia
² Institute of Microengineering and Nanoelectronics (IMEN) Universiti Kebangsaan Malaysia (UKM), 43600 Bangi, Selangor, Malaysia

^* Corresponding author: faizahz@uniten.edu.my

Abstract

This paper presents the modeling and optimization of 14nm gate length CMOS transistor which is down-scaled from previous 32nm gate length. High-k metal gate material was used in this research utilizing Hafnium Dioxide (HfO₂) as dielectric and Tungsten Silicide (WSi₂) and Titanium Silicide (TiSi₂) as a metal gate for NMOS and PMOS respectively. The devices are fabricated virtually using ATHENA module and characterized its performance evaluation via ATLAS module; both in Virtual Wafer Fabrication (VWF) of Silvaco TCAD Tools. The devices were then optimized through a process parameters variability using L9 Taguchi Method. There were four process parameter with two noise factor of different values were used to analyze the factor effect. The results show that the optimal value for both transistors are well within ITRS 2013 prediction where V_TH and I_OFF are 0.236737V and 6.995705nA/um for NMOS device and 0.248635 V and 5.26nA/um for PMOS device respectively.