| Issue |
MATEC Web of Conferences
Volume 32, 2015
International Symposium of Optomechatronics Technology (ISOT 2015)
|
|
|---|---|---|
| Article Number | 02003 | |
| Number of page(s) | 6 | |
| Section | System fabrication using femtosecond laser processing | |
| DOI | https://doi.org/10.1051/matecconf/20153202003 | |
| Published online | 02 December 2015 | |
3D electrostatic actuator fabricated by non-ablative femtosecond laser exposure and chemical etching
Galatea Laboratory, IMT/STI, Ecole Polytechnique Fédérale de Lausanne (EPFL) Rue de la Maladière 71b, 2002 Neuchâtel, Switzerland
a Corresponding author: tao.yang@epfl.ch
We demonstrate the novel design of an electrostatic micro-actuator based on monolithic three-dimensional (3D) shapes fabricated by non-ablative femtosecond laser exposure combined with chemical etching. Further, we present a single-scan stacking approach exploited in the fabrication of the 3D actuator to create crack-free, highcontrast, high fidelity and integrated micro-structures. Influential parameters: energy per pulse, polarization, scanning spacing and stacking directionwere systematically studied to predict and control the etching rate of 3D planes.Finally, we report the characterization of the actuator and its potential application in optomechanics to show a complete scenario of femtosecond laser machined integrated 3D micro-systems incorporating multiple functionalities.
© Owned by the authors, published by EDP Sciences, 2015
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.