Open Access
Issue
MATEC Web of Conferences
Volume 26, 2015
2015 3rd Asia Conference on Mechanical and Materials Engineering (ACMME 2015)
Article Number 01011
Number of page(s) 4
Section Advanced materials and properties
DOI https://doi.org/10.1051/matecconf/20152601011
Published online 12 October 2015
  1. G. Parascandolo, G. Bugnon, A. Feltrin and C. Ballif, High-rate deposition of microcrystalline silicon in a large-area PECVD reactor and integration in tandem solar cells, Prog. Photovolt. Res. Appl. 18 (2010) 257–264.
  2. E. Monaghan, T. Michna, C. Gaman, D. O’Farrel, K. Ryan, D. Adley, T.S. Perova, B. Drews, M. Jaskot, A.R. Ellingboe, Characterisation of thin silicon films deposited by plasma enhanced chemical vapour deposition at 162 MHz, using a large area, scalable, multi-tile-electrode plasma source, Thin Solid Films, 519 (2011) 6884–6886. [CrossRef]
  3. C. Smit, R.A.C.M.M. Van Swaaij, H. Donker, A.M.H.N. Petit, W.M.M. Kessels, and M.C.M. Van de Sanden, Determining the material structure of microcrystalline Silicon from Raman spectra, J. Appl. Phys., 94 (2003) 3582–3588. [CrossRef]
  4. M. Ledinsky, A. Vetushka, J. Stuchlik, T. Mates, A. Fejfar, J. Kocka, and J. Stepnek, Crystallinity of the mixed phase silicon thin films by Raman spectroscopy, J. Non-Cryst. Sol., 354 (2008) 2253–2257. [CrossRef]
  5. P. Temple and C. Hathaway, Multiphonon Raman spectrum of silicon, Phys. Rev. B, 7 (1973) 3685–3697. [CrossRef]
  6. A. V. Baranov, A. V. Fedorov, T. S. Perova, S. Solosin, R. A. Moore, V. Yam, D. Bouchier and V. Le Thanh, Polarized Raman spectroscopy of multilayer Ge/Si (001) quantum dot heterostructures, J.Appl.Phys., 96 (2004) 2857–2863. [CrossRef]
  7. Information on http://www.eigenvector.com.

Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.

Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.

Initial download of the metrics may take a while.