Polarized Raman Spectroscopy and Chemometric Analysis of Micro-crystalline Silicon for Solar Cells
1 Department of Electronic and Electrical Engineering, Trinity College Dublin, Ireland
2 ITMO University, St.-Petersburg, Russia
3 School of Physical Sciences, Dublin City University, Ireland
Micro-crystalline silicon (μc-Si:H) is currently under extensive investigation due to it’s applications in solar cells. The crystalline content and structural properties of μc-Si:H can be determined from several characterisation techniques such as high-resolution transmission electron microscopy (HRTEM), X-Ray diffraction (XRD), spectroscopic ellipsometry (SE) and Raman spectroscopy. In this paper a solution is proposed to reduce the effect of second order phonons on the Raman spectra of μc-Si:H for evaluation of crystalline volume fraction χc.
© Owned by the authors, published by EDP Sciences, 2015
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