Hybrid chemical etching of femtosecond irradiated 3D structures in fused silica glass

Sara Lo Turco; Roberto Osellame; Roberta Ramponi; Krishna Chaitanya Vishnubhatla

doi:10.1051/matecconf/20130805009

All issues

Volume 8 (2013)

MATEC Web of Conferences, 8 (2013) 05009

References

Open Access

Issue		MATEC Web of Conferences Volume 8, 2013 Progress in Ultrafast Laser Modifications of Materials


Article Number		05009
Number of page(s)		2
Section		Application in optofluidics and in microfabrication
DOI		https://doi.org/10.1051/matecconf/20130805009
Published online		18 November 2013

R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, “Femtosecond laser microstructuring: an enabling tool for optofluidic lab-onchips”, Laser Photonics Rev. 5, 442–463 (2011). [Google Scholar]
A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, “Femtosecond laser-assisted three-dimensional microfabrication in silica”, Opt. Lett. 26, 277 (2001). [Google Scholar]
Y. Bellouard, A. Said, M. Dugan, and P. Bado, “Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching”, Opt. Express 12, 2120–2129 (2004). [CrossRef] [Google Scholar]
C. Hnatovsky, R. Taylor, E. Simova, V. Bhardwaj, D. Rayner, and P. Corkum, “Polarization-selective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica”, Opt. Lett. 30, 1867 (2005). [CrossRef] [Google Scholar]
V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, and P. Laporta, “Fabrication of long microchannels with circular cross section using astigmatically shaped femtosecond laser pulses and chemical etching”, Appl. Phys. Lett. 88, 191107 (2006). [CrossRef] [Google Scholar]
S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, “Examination of Etching Agent and Etching Mechanism on Femotosecond Laser Microfabrication of Channels Inside Vitreous Silica Substrates”, J. Phys. Chem. C 113, 11560 (2009). [CrossRef] [Google Scholar]

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[1] R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, “Femtosecond laser microstructuring: an enabling tool for optofluidic lab-onchips”, Laser Photonics Rev. 5, 442–463 (2011). [Google Scholar]

[2] A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, “Femtosecond laser-assisted three-dimensional microfabrication in silica”, Opt. Lett. 26, 277 (2001). [Google Scholar]

[3] Y. Bellouard, A. Said, M. Dugan, and P. Bado, “Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching”, Opt. Express 12, 2120–2129 (2004). [CrossRef] [Google Scholar]

[4] C. Hnatovsky, R. Taylor, E. Simova, V. Bhardwaj, D. Rayner, and P. Corkum, “Polarization-selective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica”, Opt. Lett. 30, 1867 (2005). [CrossRef] [Google Scholar]

[5] V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, and P. Laporta, “Fabrication of long microchannels with circular cross section using astigmatically shaped femtosecond laser pulses and chemical etching”, Appl. Phys. Lett. 88, 191107 (2006). [CrossRef] [Google Scholar]

[6] S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, “Examination of Etching Agent and Etching Mechanism on Femotosecond Laser Microfabrication of Channels Inside Vitreous Silica Substrates”, J. Phys. Chem. C 113, 11560 (2009). [CrossRef] [Google Scholar]