Open Access
Issue
MATEC Web of Conferences
Volume 8, 2013
Progress in Ultrafast Laser Modifications of Materials
Article Number 05009
Number of page(s) 2
Section Application in optofluidics and in microfabrication
DOI https://doi.org/10.1051/matecconf/20130805009
Published online 18 November 2013
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  2. A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, “Femtosecond laser-assisted three-dimensional microfabrication in silica”, Opt. Lett. 26, 277 (2001). [CrossRef]
  3. Y. Bellouard, A. Said, M. Dugan, and P. Bado, “Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching”, Opt. Express 12, 2120–2129 (2004). [CrossRef]
  4. C. Hnatovsky, R. Taylor, E. Simova, V. Bhardwaj, D. Rayner, and P. Corkum, “Polarization-selective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica”, Opt. Lett. 30, 1867 (2005). [CrossRef]
  5. V. Maselli, R. Osellame, G. Cerullo, R. Ramponi, and P. Laporta, “Fabrication of long microchannels with circular cross section using astigmatically shaped femtosecond laser pulses and chemical etching”, Appl. Phys. Lett. 88, 191107 (2006). [CrossRef]
  6. S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, “Examination of Etching Agent and Etching Mechanism on Femotosecond Laser Microfabrication of Channels Inside Vitreous Silica Substrates”, J. Phys. Chem. C 113, 11560 (2009). [CrossRef]

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