MATEC Web Conf.
Volume 290, 20199th International Conference on Manufacturing Science and Education – MSE 2019 “Trends in New Industrial Revolution”
|Number of page(s)||14|
|Section||Mechanical Engineering, Mechatronics and Robotics|
|Published online||21 August 2019|
Modeling, simulation and experimental research for MEMS cantilevers of complex geometry
1 POLITEHNICA University of Bucharest, Dpt. of Strength of Materials, 313, Splaiul Independentei, 060042, Bucharest, Romania
2 POLITEHNICA University of Bucharest, Dpt. of Mechatronics and Precision Mechanics, 313, Splaiul Independentei, 060042, Bucharest, Romania
3 National Institute for Research and Development in Microtechnologies, 126A, Erou Iancu Nicolae Street, 077190, Bucharest, Romania
* Corresponding author: firstname.lastname@example.org
The fundamental resonant frequencies for MEMS cantilevers of complex geometry (paddle-shaped rectangular microbeam, homogeneous on a part of length and nonhomogeneous, layered structure to the wider part of the beam) are calculated. A method of analytical calculation using the Mohr-Maxwell theory is proposed for homogeneous microcantilevers, which is then adapted for non-homogeneous structures. The analytical model has been validated by numerical simulation using finite element method (FEM). The experimental validation has been made using laser-Doppler vibrometry (LDV) by scanning with the Polytec MSA-500 system.
© The Authors, published by EDP Sciences, 2019
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