MATEC Web Conf.
Volume 63, 20162016 International Conference on Mechatronics, Manufacturing and Materials Engineering (MMME 2016)
|Number of page(s)||8|
|Section||Computer Engineering and Applications|
|Published online||12 July 2016|
Force rebalance control for a MEMS gyroscope using ascending frequency drive and generalized PI control
1 National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China
2 Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, No.5 Electronics Research Institute of the Ministry of Industry and Information Technology, Guangzhou, 510610, Guangdong, P. R. China
This paper has proposed a novel force rebalance control method for a MEMS gyroscope using ascending frequency drive and generalized PI control. Theoretical analyses of ascending frequency drive and force rebalance control methods are illustrated in detail. Experimental results demonstrate that the electrical anti-resonant peaks are located at the frequency responses in the RFD system, which seriously deteriorates the original response characteristics. However, they are eliminated in the AFD system, and the electrical coupling signal is also suppressed. Besides, as for the force rebalance control system, the phase margins approximate to 60deg, gain margins are larger than 13dB, and sensitivity margins are smaller than 3.2dB, which validates the control system is stable and robust. The bandwidth of the force rebalance control system is measured to be about 103.2Hz, which accords with the simulation result. The bias instability and angle random walk are evaluated to be 1.65deg/h and 0.06deg/√h, respectively, which achieves the tactical level.
Key words: MEMS gyroscope / mode-matching / force rebalance control / ascending frequency drive / electrical coupling suppressing
© Owned by the authors, published by EDP Sciences, 2016
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