Open Access
Issue
MATEC Web Conf.
Volume 355, 2022
2021 International Conference on Physics, Computing and Mathematical (ICPCM2021)
Article Number 02012
Number of page(s) 9
Section Mathematical Science and Application
DOI https://doi.org/10.1051/matecconf/202235502012
Published online 12 January 2022
  1. M. S. Weinberg and A. A, “Error sources in in-plane silicon tuning-fork MEMS gyroscopes,” J. Microelectromechanical. Syst., vol. 15, no.3, pp. 479–491, Jun. 2006. [Google Scholar]
  2. SH D. D, A P. P, Q. Q,“Calculation and verification of quadrature coupling coefficient of silicon micro-gyroscope,” [J]. Opt. Precision Eng., 2013, 21(1): 87–93. [Google Scholar]
  3. B. B, B L. Zhou. “Analysis of Quadrature Error of Dual -Frame Silicon Micro-machined Gyroscope,” International Conference on Electrical and Control Engineering. Sept. 16-18, 2011. pp. 3931–3934 [Google Scholar]
  4. B. B, X. X, D. D, and L. L, “Research on the non-ideal dynamics of a dual-mass silicon micro-gyroscope,” Microsystem Technologies, vol. 23, no. 1, pp. 151–162, 2017 [Google Scholar]
  5. E. E, S. E. Alper, and T. T, “Effect of quadrature error on the performance of a fully-decoupled MEMS gyroscope,” in Proc. Int. Conf. MEMS, Cancun, Mexico, Jan. 2011, pp. 569–572 [Google Scholar]
  6. B. B, X. X, Y. Y, et al. Mechanical Coupling Error Suppression Technology for an Improved Decoupled Dual-Mass Micro-Gyroscope[J]. Sensors, 2016, 16(4):503. [Google Scholar]

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