Open Access
Issue
MATEC Web Conf.
Volume 224, 2018
International Conference on Modern Trends in Manufacturing Technologies and Equipment (ICMTMTE 2018)
Article Number 01117
Number of page(s) 6
Section Manufacturing Technologies, Tools and Equipment
DOI https://doi.org/10.1051/matecconf/201822401117
Published online 30 October 2018
  1. V. Gorohov, E. Zaharevich, M, Skvortsova, The increasing of metal-optic fittings precise by diamond turning on ultraprecise tools, Photonics, № 1, P. 118–123 (2014) [Google Scholar]
  2. A.E. Zarvin, Cluster beam in rare gas: from science to technology, Report book of XXII Science and Technical Conference “Vacuum science and technic”, M.: 2015, P. 39–41 [Google Scholar]
  3. H. Chenetal. NIMB, V. 241, p. 630 [Google Scholar]
  4. F. Frost, R. Fechner, B. Ziberi, J. Vollner, D. Flamm, A. Schindler, Large area smoothing of surfaces by ion bombardment: fundamentals and applications, J. Phys.: Condens. Matter 21 224026 (20pp) (2009) [CrossRef] [Google Scholar]
  5. A.I. Stogniy, N.N. Novitskiy, O.M. Stukalov, Ion-beam polishing of the nanosize relief of an optic materials surface, Letters to GTF, V.28, Issue 1 (2002) [Google Scholar]
  6. Yilong Wu, Weiguo Liu, Lingxia Hang, Research on RF-generated Plasma Polishing, Physics Procedia 32, 590–597, 1875–3892 (2012) [Google Scholar]
  7. Yuan Tian, Weiguo Liu, Lingxia Hang. Influence of Oxygen Flow Rate on the Variation of Surface Roughness of Fused Silica during Plasma Polishing Process. Physics Procedia 18, 107–111, 1875–3892 (2011) [Google Scholar]

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