| Issue |
MATEC Web Conf.
Volume 224, 2018
International Conference on Modern Trends in Manufacturing Technologies and Equipment (ICMTMTE 2018)
|
|
|---|---|---|
| Article Number | 01117 | |
| Number of page(s) | 6 | |
| Section | Manufacturing Technologies, Tools and Equipment | |
| DOI | https://doi.org/10.1051/matecconf/201822401117 | |
| Published online | 30 October 2018 | |
Vacuum methods of surface treatment with subnanometer roughness
MSTU named after Bauman, Electronic Technology in Machinery Chair, 105005 Moscow, 2-d Baumanskay St., 5, Russia
* Corresponding author: panfilov@bmstu.ru
Vacuum methods of surfaces with 1 nm or less roughness treatment were analyzed.Physical models of super sleek surfaces polishing into vacuum cambers by means of ion beam etching and thin film deposition and ion cluster treatment were shown.The results of experimental research of ion cluster polishing with differentregimes were represented.Prospects of surface treatment with subnanometer roughness by means of vacuum methods are represented.
© The Authors, published by EDP Sciences, 2018
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