Open Access
Issue |
MATEC Web Conf.
Volume 160, 2018
International Conference on Electrical Engineering, Control and Robotics (EECR 2018)
|
|
---|---|---|
Article Number | 05008 | |
Number of page(s) | 6 | |
Section | Control Theory and Method | |
DOI | https://doi.org/10.1051/matecconf/201816005008 | |
Published online | 09 April 2018 |
- B Borovic1, et al, “Open-loop versus closed-loop control of MEMS devices choices and issues”, Journal of Micromechanics and micorengineering, pp1917–1924,2005 [CrossRef] [Google Scholar]
- Zhaohui Song, Teng Sun, and Jian Wu, “System-level simulation and implementation for a high Q capacitive accelerometer with PD feedback compensation”, Microsyst Technol, vol. pp. 2233–2240, 2015. [CrossRef] [Google Scholar]
- Yin Liang, et al, “High resolution interface circuit for closed-loop accelerometer”, Journal of Semiconductors, vol. 32, pp.(045005)1-8, 2011 [Google Scholar]
- Yuntao Liu et al, “Stability Analysis in High-Order Electromechanical Sigma-Delta Accelerometer”, Key Engineering Materials, vol 483, pp 716-720, 2011 [CrossRef] [Google Scholar]
- Bin Wang, et al, “Model of Closed-loop Detection System for Capacitive MEMS Accelerometer and its IC Realization”, Advanced Materials Research, vol 468, pp 2170-2175, 2012 [Google Scholar]
- Shaodong Chen, Honglin Xu, “Design analysis of a high-Q micromechanical capacitive accelerometer system”, IEICE Electronics Express, vol.14, pp.1-6, 2017 [Google Scholar]
- Mingjun MA, Zhong He, and Hui Jie, “A combined modulated feedback and temperature compensation approach to improve bias drift of a closed-loop MEMS capacitive accelerometer”, Frontiers of Information Technology & Electronic Engineering, vol.16, pp.497-510, 2015 [CrossRef] [Google Scholar]
- Zhang Meimei, Quan Haiyang and Zhang Fuqiang, “Comparisons of Feed-Forward and Multiple-Feedback Sigma-Delta Modulators for MEMS Accelerometers”, MATEC Web of Conferences, 08003,2016 [CrossRef] [EDP Sciences] [Google Scholar]
- Zhimin Li, Terri S. Fiez, “A 14 Bit Continuous-Time Delta-Sigma A/D”, IEEE Journal of Solid-State Circuits, vol. 42, pp.1873-1883, 2007. [CrossRef] [Google Scholar]
- Y.F.Dong, Kraft.M, “Force feedback linearization for higher-order electromechanical sigma-delta modulators, Journal of Micromechanics and micorengineering”, vol.16, pp.54-60, 2006 [Google Scholar]
- H. Kulah, J. Chae, and K. Najafi, “Noise analysis and characterization of a sigma-delta capacitive microaccelerometer”, IEEE Journal of Solid-State Circuits, vol.41, pp.352–361, 2006 [CrossRef] [Google Scholar]
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