Open Access
MATEC Web Conf.
Volume 139, 2017
2017 3rd International Conference on Mechanical, Electronic and Information Technology Engineering (ICMITE 2017)
Article Number 00200
Number of page(s) 4
Published online 05 December 2017
  1. Gregory T A Kovacs. Micromachined Transducers:Sourcebook [M]. Boston:WCB, 1998. [Google Scholar]
  2. Minxin Zhou, Qingan Huang, Ming Qin. Modeling, design and fabrication of a triple-layered capacitive pressure sensor[J]. Sensors and Actuators A:physical, 2005, 117(1):71–81. [CrossRef] [Google Scholar]
  3. EG Bakhoum, Cheng MH. Capacitive pressure sensor with very large dynamic range [J]. IEEE Transactions on Components and Packaging, 2010, 33, 79–83. [CrossRef] [Google Scholar]
  4. Zhenhai Chen, RC Luo. Design and implementation of capacitive proximity sensor using microelectromechanical systems technology[J]. IEEE Transactions on Industrial Electronics, 2002, 45:886–894. [CrossRef] [Google Scholar]
  5. Yang Chundi, Wang Ming, Ge Yixian, et al.. A miniature extrinsic fiber Fabry-Perot pressure sensor[J]. Acta Optica Sinica, 2011, 30(5):1358–1361. [CrossRef] [Google Scholar]
  6. Wang Lihua, Wang Ming, Rong Hua, et al.. Design and simulation of miniatureshear stress sensor based on Fabry-Perot interference[J]. Acta Optica Sinica, 2012. 32(s1):s128003. [Google Scholar]
  7. Ni Xiaoqi, Wang Ming, Chen Xunxing, et al.. Wavelength multiplexing of optical fiber microelectromechanical system Fabry-Perot pressure sensor[J]. Acta Optica Sinica, 2007, 27(5):0776–0780. [Google Scholar]
  8. Ke Tao, Zhu Tao, Rao Yunjiang, et al.. Accelerometer based on all-fiber Fabry-Perot interferometer formed by hollow-core photonic crystal fiber[J]. Chinese J Lasers, 2010, 37(1):171–175. [CrossRef] [Google Scholar]
  9. Yanfeng Jiang, Qingan Huang. A physical model for silicon anisotropic chemical etching[J]. Seminconductor Science and Technology, 2005, 20(6):524–531. [Google Scholar]
  10. Nacer Eddine Demagh, Assia Guessoum, Hind Aissat, Chemical etching of concave conefibre ends for core fibre alignment[J]. Meas Sci Technol, 2006, 17:119–122. [CrossRef] [Google Scholar]
  11. Gregory TA Kovacs. Micromachined Transducers Source book[M]. Zhang Wendong et al. Transl. Beijing: Science Press, 2003. 181. [Google Scholar]

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