MATEC Web of Conferences
Volume 32, 2015International Symposium of Optomechatronics Technology (ISOT 2015)
|Number of page(s)||4|
|Published online||02 December 2015|
MEMS acceleration sensor with remote optical readout for continuous power generator monitoring
1 CSEM SA, Rue J. Droz 1, 2002 Neuchatel, Switzerland
2 MC-Monitoring SA, Route André Piller 19, 1762 Givisiez, Switzerland
a Corresponding author: firstname.lastname@example.org
Miniaturized accelerometers with remote optical readout are required devices for the continuous monitoring of vibrations inside power generators. In turbo and hydro generators, end-winding vibrations are present during operation causing in the long term undesirable out-of-service repairs. Continuous monitoring of these vibrations is therefore mandatory. The high electromagnetic fields in the generators impose the use of devices immune to electromagnetic interferences. In this paper a MEMS based accelerometer with remote optical readout is presented. Advantages of the proposed device are the use of a differential optical signal to reject the common mode signal and noise, the reduced number of steps for the MEMS chip fabrication and for the system assembly, and the reduced package volume.
© Owned by the authors, published by EDP Sciences, 2015
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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