MATEC Web Conf.
Volume 139, 20172017 3rd International Conference on Mechanical, Electronic and Information Technology Engineering (ICMITE 2017)
|Number of page(s)||4|
|Published online||05 December 2017|
Fiber fabry-pero micro pressure sensor
1 College of Computer and information engineering, Anyang Normal University, Anyang 455000
2 International WIC Institute, Beijing University of Technology, Beijing 100124
A new fiber fabry-perot pressure sensor is designed. It is made by photolithography, silicon wafer etching, anode bonding, microelectromechanical system technology and so on. It is suitable for the pressure measurement of micro-pressure environment under harsh environment and small space. The structure of the transmitter and the way to make it are described in detail. The design smartly uses the Fiber optic flange, the optical fiber end face is parallel to the sensitive film, thus a high-quality Fabry-Pero-cavity is formed. The structure also contributes to the stability of the initial cavity, the sensor error is reduced. The experimental demodulation system is established, the pressure, temperature and other characteristics are tested in detail. The experiment result shows that within the pressure range of 0~0.1MPa, the sensor has a good linearity, high repeatability and a sensitivity of 61.6 μm/MPa.
Key words: sensors; / micro-pressure sensor; / fiber optics sensor; / Fabry-Perot; / micro-electromechanicalsystem technology
© The Authors, published by EDP Sciences, 2017
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (http://creativecommons.org/licenses/by/4.0/).
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