MATEC Web Conf.
Volume 63, 20162016 International Conference on Mechatronics, Manufacturing and Materials Engineering (MMME 2016)
|Number of page(s)||4|
|Section||Manufacturing and Design Science|
|Published online||12 July 2016|
- Zhu Yu, Wen Sheng, Duan Guanhong . Research on ultra-Precision Stages of lithography. Lithography technology [J]. 2004. 33(2).
- H Shinno, H Yoshioka, K. Taniguchi A newly developed linear motor-driven aerostatic X-Y planar motion table system for nano-manchining. Annals of the CIRP, 2007, 56(1) [CrossRef]
- Verma Shobhit, Kim Won-Jong, Shakir Huzefa. Multi-axis maglev nanopositioner for precision manufacturing and manipulation applications. IEEE Transactions on Industry Applications, 2005, 41(5).
- T Aoyama, Y Kakinuma, Y. Kobayashi Numerical and experimental analysis for the small vibration of aerostatic guideways. CIRP Annals-Manufacturing Technology[J], 2006, 55(1).
- Chen Xuedong, He Xueming. The effect of the recess shape on performance analysis of the lubricated bearing in optical lithography, Tribology International[J], 2006, 39(11).
- Zhang Ming, Zhu Yu, Duan Guanhong . Micro-vibration of Ultra-precision Gas Bearing Linear Motion Stage and Its Elimination. Design and research [J]. 2005, (11).
- Chen Dongju, Zhang Feihu, Fu Pengqiang. Identification Fluctuation of Aerostatic Guideway. Journal of Mecheanical Engineering[J]. 2010, 46(21).
- Ji Lujun, Zhang Ming, Hu Jinchun, Zhu Yu. Stability to vertical impulse perturbation of plane externally pressrize gas bearings. Tsing Univ(Sci&Tech)[J]. 2011, 51 (6).
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