Open Access
MATEC Web of Conferences
Volume 16, 2014
CSNDD 2014 - International Conference on Structural Nonlinear Dynamics and Diagnosis
Article Number 04003
Number of page(s) 4
Section Nonlinear dynamics of MEMS/NEMS/AFM
Published online 01 September 2014
  1. Loughborough, Leics, LE11 3TU (2002) [Google Scholar]
  2. Salvatore A. Vittorio, Microelectromechanical systems (2001) [Google Scholar]
  3. P. Sangeetha, A.V. Juliet, Biosensor for tuberculosis disease using MEMS device (2013) [Google Scholar]
  4. Carnegie Mellon University, MEMS and Reliability (1999) [Google Scholar]
  5. M. Zaghloul, R. A. Mcgill, E.J. Houser, G. K.Fedder, Electrostatically actuated resonant microcantilever beam in CMOS Technology for the detection of chemical weapons, 5 (4) (2005). [Google Scholar]
  6. L. A. Rocha, E. Cretu, R. F. Wolffenbuttel, Full in characterization of pull-In in single sided clamped beams, Sensors and Actuators: Physical A, 110, 301–309 (2004). [CrossRef] [Google Scholar]
  7. R. Puers, D. Lapadatu, Electrostatic forces and their effects on mechanical sensors, Sensors and Actuators: Physical A, 56, 203–210 (1996). [CrossRef] [Google Scholar]
  8. B. Mukherjee, K. B. M. Swamy, S. Kar, S. Sen, Effect of Voltage Induced Electrostatic forces on MEMS Capacitive accelerometer, Pro. of the IEEE Students’ Technology Symposium, 2011, lIT Kharagpur. [Google Scholar]
  9. M. Andrejesaic, MEMS Accelerometers Seminar (2008) [Google Scholar]
  10. M. Mojahedi, M. Moghimi, Z. M.T. Ahmadian, Static Pull In analysis of electrostatically actuated microbeams using homotopy perturbation method, Appl. Math. Mod. 34 1032–1041 (2010). [Google Scholar]
  11. S. Chowdhury, M. Ahmadi, W.C. Miller, Pull In Voltage study of Electrostatically actuated Fixed-Fixed beams using a VLSI on-Chip Interconnect Capacitance Model, Journal of Microelectromechanical systems, 15, 639–651 (2006) [CrossRef] [Google Scholar]
  12. S. Chowdhury, M. Ahmadi, W.C. Miller, A Comparison of Pull-In Voltage Calculation methods for MEMS based Electrostatic Actuator design, 1st International Conference on Sensing Technology, New Zealand (2005). [Google Scholar]

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