Open Access
Issue |
MATEC Web of Conferences
Volume 16, 2014
CSNDD 2014 - International Conference on Structural Nonlinear Dynamics and Diagnosis
|
|
---|---|---|
Article Number | 04003 | |
Number of page(s) | 4 | |
Section | Nonlinear dynamics of MEMS/NEMS/AFM | |
DOI | https://doi.org/10.1051/matecconf/20141604003 | |
Published online | 01 September 2014 |
- Loughborough, Leics, LE11 3TU (2002) [Google Scholar]
- Salvatore A. Vittorio, Microelectromechanical systems (2001) [Google Scholar]
- P. Sangeetha, A.V. Juliet, Biosensor for tuberculosis disease using MEMS device (2013) [Google Scholar]
- Carnegie Mellon University, MEMS and Reliability (1999) [Google Scholar]
- M. Zaghloul, R. A. Mcgill, E.J. Houser, G. K.Fedder, Electrostatically actuated resonant microcantilever beam in CMOS Technology for the detection of chemical weapons, 5 (4) (2005). [Google Scholar]
- L. A. Rocha, E. Cretu, R. F. Wolffenbuttel, Full in characterization of pull-In in single sided clamped beams, Sensors and Actuators: Physical A, 110, 301–309 (2004). [CrossRef] [Google Scholar]
- R. Puers, D. Lapadatu, Electrostatic forces and their effects on mechanical sensors, Sensors and Actuators: Physical A, 56, 203–210 (1996). [CrossRef] [Google Scholar]
- B. Mukherjee, K. B. M. Swamy, S. Kar, S. Sen, Effect of Voltage Induced Electrostatic forces on MEMS Capacitive accelerometer, Pro. of the IEEE Students’ Technology Symposium, 2011, lIT Kharagpur. [Google Scholar]
- M. Andrejesaic, MEMS Accelerometers Seminar (2008) [Google Scholar]
- M. Mojahedi, M. Moghimi, Z. M.T. Ahmadian, Static Pull In analysis of electrostatically actuated microbeams using homotopy perturbation method, Appl. Math. Mod. 34 1032–1041 (2010). [Google Scholar]
- S. Chowdhury, M. Ahmadi, W.C. Miller, Pull In Voltage study of Electrostatically actuated Fixed-Fixed beams using a VLSI on-Chip Interconnect Capacitance Model, Journal of Microelectromechanical systems, 15, 639–651 (2006) [CrossRef] [Google Scholar]
- S. Chowdhury, M. Ahmadi, W.C. Miller, A Comparison of Pull-In Voltage Calculation methods for MEMS based Electrostatic Actuator design, 1st International Conference on Sensing Technology, New Zealand (2005). [Google Scholar]
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.