MATEC Web Conf.
Volume 83, 2016CSNDD 2016 - International Conference on Structural Nonlinear Dynamics and Diagnosis
|Number of page(s)||5|
|Section||Nonlinear dynamics in MEMS, NEMS and AFM|
|Published online||16 November 2016|
Investigation of the nonlinear static and dynamic behaviour of rectangular microplates under electrostatic actuation
4700 King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
We present an investigation of the static and dynamic behavior of the nonlinear von-Karman plates when actuated by the nonlinear electrostatic forces. The investigation is based on a reduced order model developed using the Galerkin method, which rely on modeshapes and in-plane shape functions extracted using a finite element method. In this study, a fully clamped microplate is considered. We investigate the static behavior and the results are validated by comparison with the results calculated by a finite element model. The forced-vibration response of the plate is then investigated when the plate is excited by a harmonic AC load superimposed to a DC load. The dynamic behavior is examined near the primary resonance. The microplate shows a strong hardening behavior due to the cubic nonlinearity of mid-plane stretching. However, the behavior switches to softening as the DC load is increased.
© The Authors, published by EDP Sciences, 2016
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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