MATEC Web of Conferences
Volume 8, 2013Progress in Ultrafast Laser Modifications of Materials
|Number of page(s)||2|
|Section||Advanced parallel processing through beam and temporal shaping|
|Published online||18 November 2013|
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- S. Matsuo, Y. Umeda, T. Tomita, and S. Hashimoto, “Laser-Scanning Direction Effect in Femtosecond Laser-Assisted Etching”, Journal of Laser Micro / Nanoengineering, in press (2013).
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