| Issue |
MATEC Web Conf.
Volume 327, 2020
2020 4th International Conference on Measurement Instrumentation and Electronics (ICMIE 2020)
|
|
|---|---|---|
| Article Number | 01004 | |
| Number of page(s) | 4 | |
| Section | Modern Sensors and Detection Technology | |
| DOI | https://doi.org/10.1051/matecconf/202032701004 | |
| Published online | 06 November 2020 | |
An ISFET sensor based on In2O3 nanoribbon for pH detection of micro solutions
College of Electrical Engineering and Control Science, Nanjing Tech University, Nanjing, China
* Corresponding author: wangyiqing@njtech.edu.cn
In this paper, an ISFET sensor based on In2O3 nanoribbon is developed for pH detection of micro solutions. A double channel ISFET is designed which includes the In2O3 nanoribbon top channel and silicon substrate bottom channel so as to realize the pH detection of the micro solutions. Through experiments, the sensitivity of the sensor is 70 mV/pH in the range of pH 6 to pH 10, which exceeds the Nernst limit of 59.2 mV/pH (300 K) at room temperature. Taking the detection of cTnI as an example, the pH sensor can be used to detect the concentration of biomarkers
© The Authors, published by EDP Sciences, 2020
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