MATEC Web Conf.
Volume 298, 2019International Conference on Modern Trends in Manufacturing Technologies and Equipment: Mechanical Engineering and Materials Science (ICMTMTE 2019)
|Number of page(s)||7|
|Published online||18 November 2019|
Influence of deposition conditions on structure parameters and mechanical properties of multi-element coatings based on niobium nitride
Federal State Budgetary Educational Institution of Higher Education Ulyanovsk State Technical University, Ulyanovsk, Russian Federation
2 Federal State Budgetary Educational Institution of Higher Education Ulyanovsk Institute of Civil Aviation named after Chief Marshal of Aviation B.P. Bugaev, Ulyanovsk, Russian Federation
* Corresponding author: firstname.lastname@example.org
The paper presents the results of studies of the influence of the deposition conditions, coatings NbTiZrN, NbTiAlN on structure parameters and mechanical properties. It is shown that the changes of these parameters depend on the composition of coatings. It was found that the condensation temperature affects the phase composition of the coating. Data obtained can be used when choosing functional layers of multi-element coatings.
© The Authors, published by EDP Sciences, 2019
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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