MATEC Web Conf.
Volume 232, 20182018 2nd International Conference on Electronic Information Technology and Computer Engineering (EITCE 2018)
|Number of page(s)||4|
|Section||Circuit Simulation, Electric Modules and Displacement Sensor|
|Published online||19 November 2018|
Study on the performance of MOS - based displacement sensor
College of Mechanical & Automotive Engineering, Shanghai University of Engineering Science, Shanghai, China
2 College of Mechanical & Automotive Engineering, Shanghai University of Engineering Science, Shanghai, China
The AZO film has a laser-induced lateral photovoltage (LPV): the saturation values of this photovoltage vary linearly with the position of laser spot. While, we coated a diatomite film on position sensitive detectors based on AZO-SiO2-Si structure. Sensitivity and saturation power are apparently improved, and the sensitivity reached 108.1mw/mm for the transient peak value. Maximum saturation voltage reached 72.1mw. This work demonstrates a novel way to increase sensitivity for position sensitive detectors.
© The Authors, published by EDP Sciences, 2018
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