Issue |
MATEC Web Conf.
Volume 232, 2018
2018 2nd International Conference on Electronic Information Technology and Computer Engineering (EITCE 2018)
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Article Number | 04089 | |
Number of page(s) | 4 | |
Section | Circuit Simulation, Electric Modules and Displacement Sensor | |
DOI | https://doi.org/10.1051/matecconf/201823204089 | |
Published online | 19 November 2018 |
Study on the performance of MOS - based displacement sensor
1
College of Mechanical & Automotive Engineering, Shanghai University of Engineering Science, Shanghai, China
2
College of Mechanical & Automotive Engineering, Shanghai University of Engineering Science, Shanghai, China
The AZO film has a laser-induced lateral photovoltage (LPV): the saturation values of this photovoltage vary linearly with the position of laser spot. While, we coated a diatomite film on position sensitive detectors based on AZO-SiO2-Si structure. Sensitivity and saturation power are apparently improved, and the sensitivity reached 108.1mw/mm for the transient peak value. Maximum saturation voltage reached 72.1mw. This work demonstrates a novel way to increase sensitivity for position sensitive detectors.
© The Authors, published by EDP Sciences, 2018
This is an open access article distributed under the terms of the Creative Commons Attribution License 4.0 (http://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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