MATEC Web of Conferences
Volume 54, 20162016 7th International Conference on Mechanical, Industrial, and Manufacturing Technologies (MIMT 2016)
|Number of page(s)||5|
|Section||Mechanical control and manufacturing system|
|Published online||22 April 2016|
The Influence of Couple Stress Components and Electrostatic Actuation on Free Vibration Characteristics of Thin Micro-Plates
Department of Mechanical Engineering, Faculty of Engineering, Ferdowsi University of Mashhad, Mashhad, Iran
The present paper deals specifically with the frequently asked question of are there any differences between classical non-actuated mode-shapes of plate-type MEMS and the electrically deformed ones obtained by the non-classical modified couple stress theory. To this end, a Kirchhoff’s thin plate model together with the modified couple stress theory is considered to extract the eigenvalue problem which governs on free vibrations of the system. Using the free vibration equation of the system, it is proved that neither the electrostatic actuation nor the couple stress components influence on linear mode-shapes of the system. To emphasis on the validity of the present proof, the extended Kantorovich method is employed to provide analytical solutions for an electrically actuated micro-plate with clamped boundary conditions. The solutions, whose accuracy is verified by available results in the literature, also indicate that the linear mode-shapes of an electrically actuated micro-plate are totally independent from the influences of size and electrical loading.
© Owned by the authors, published by EDP Sciences, 2016
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.