| Issue |
MATEC Web of Conferences
Volume 1, 2012
CSNDD 2012 – International Conference on Structural Nonlinear Dynamics and Diagnosis
|
|
|---|---|---|
| Article Number | 04007 | |
| Number of page(s) | 6 | |
| Section | Nonlinear Dynamics of MEMS/NEMS/AFM | |
| DOI | https://doi.org/10.1051/matecconf/20120104007 | |
| Published online | 09 July 2012 | |
Nonlinear dynamics of nanoelectromechanical cantilevers based on nanowire piezoresistive detection
1 FEMTO-ST Institute – UMR CNRS 6174, 24, chemin de l’Épitaphe, F-25000 Besançon, France
2 CEA/LETI – MINATEC, Grenoble, France
3 Université de Lyon, CNRS, INSA-Lyon, LaMCoS UMR5259, F-69621 Villeurbanne, France
a e-mail: najib.kacem@femto-st.fr
The nonlinear dynamics of in-plane nanoelectromechanical cantilevers based on silicon nanowire piezoresistive detection is investigated using a comprehensive analytical model that remains valid up to large displacements in the case of electrostatic actuation. This multiphysics model takes into account geometric, inertial and electrostatic nonlinearities as well as the fringing field effects which are significant for thin resonators. The bistability as well as multistability limits are considered in order to provide close-form expressions of the critical amplitudes. Third order nonlinearity cancellation is analytically inspected and set via an optimal DC drive voltage which permits the actuation of the NEMS beyond its critical amplitude. It may result on a large enhancement of the sensor performances by driving optimally the nanocantilever at very large amplitude, while suppressing the hysteresis.
© Owned by the authors, published by EDP Sciences, 2012
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.