| Issue |
MATEC Web of Conferences
Volume 44, 2016
2016 International Conference on Electronic, Information and Computer Engineering
|
|
|---|---|---|
| Article Number | 02037 | |
| Number of page(s) | 4 | |
| Section | Electronics, Information and Engineering Application | |
| DOI | https://doi.org/10.1051/matecconf/20164402037 | |
| Published online | 08 March 2016 | |
Gate Engineering in SOI LDMOS for Device Reliability
1
Department of Computer Science and Information Engineering, Asia University,, 500, Lioufeng Rd., Taichung 41354, Taiwan
2
School of Software and Microelectronics, Peking University, Beijing, China
a Corresponding author: aanand92@gmail.com
A linearly graded doping drift region with step gate structure, used for improvement of reduced surface field (RESURF) SOI LDMOS transistor performance has been simulated with 0.35µm technology in this paper. The proposed device has one poly gate and double metal gate arranged in a stepped manner, from channel to drift region. The first gate uses n+ poly (near source) where as other two gates of aluminium. The first gate with thin gate oxide has good control over the channel charge. The third gate with thick gate oxide at drift region reduce gate to drain capacitance. The arrangement of second and third gates in a stepped manner in drift region spreads the electric field uniformly. Using two dimensional device simulations, the proposed SOI LDMOS is compared with conventional structure and the extended metal structure. We demonstrate that the proposed device exhibits significant enhancement in linearity, breakdown voltage, on-resistance and HCI. Double metal gate reduces the impact ionization area which helps to improve the Hot Carrier Injection effect..
© Owned by the authors, published by EDP Sciences, 2016
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.