MATEC Web of Conferences
Volume 42, 20162015 The 3rd International Conference on Control, Mechatronics and Automation (ICCMA 2015)
|Number of page(s)||4|
|Section||Electronic application technologies|
|Published online||17 February 2016|
Study on a New Method for Improving Resolution of Grating Interferometer Displacement Measuring System
School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China
a Corresponding author: Lun Shi, Associate professor of Shanghai Jiao Tong University, email: firstname.lastname@example.org. The study is supported by NSFC(51275306)
A method for improving resolution of grating interferometer displacement measuring system is developed in this paper. The measurement system consists of a grating interferometer and a phase-shift device. Two interference fringes are required in the detecting field of photoelectric sensor. If we change the signal phase of the interference fringe by moving the photoelectric sensor between the two interference fringes, the displacement equivalent converted from the photoelectric sensor will changed. The method is applied in positioning system and the experiments’ results indicate that the new displacement measuring method will improve the positioning accuracy about 33%. Also, the errors in the positioning process with the new method are discussed in briefly.
Key words: Grating interferometer / phase shift / displacement
© Owned by the authors, published by EDP Sciences, 2016
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.