Articles citing this article

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Cited article:

Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results

B Berger, D Eremin, M Oberberg, et al.
Plasma Sources Science and Technology 32 (4) 045009 (2023)
https://doi.org/10.1088/1361-6595/acc480

Anomalously enhanced light-emitting diode cooling via nucleate boiling using graphene-nanoplatelets coatings

Yi Shen Lim and Yew Mun Hung
Energy Conversion and Management 244 114522 (2021)
https://doi.org/10.1016/j.enconman.2021.114522

Development of AlNB alloy in (Al/AlN/B) stacking sequence using RF reactive sputtering towards thermal management application

Abdulkarim Hamza El-ladan and Shanmugan Subramani
Journal of Materials Science: Materials in Electronics 32 (1) 577 (2021)
https://doi.org/10.1007/s10854-020-04840-3

The magnetic asymmetry effect in geometrically asymmetric capacitively coupled radio frequency discharges operated in Ar/O2

M Oberberg, B Berger, M Buschheuer, et al.
Plasma Sources Science and Technology 29 (7) 075013 (2020)
https://doi.org/10.1088/1361-6595/ab9b31

Ion energy control via the electrical asymmetry effect to tune coating properties in reactive radio frequency sputtering

Stefan Ries, Lars Banko, Marcus Hans, et al.
Plasma Sources Science and Technology 28 (11) 114001 (2019)
https://doi.org/10.1088/1361-6595/ab504b

Reduction of Structural Thermal Resistance for Deep Ultraviolet Light-Emitting Diodes Fabricated on AlN Ceramic Substrate via Copper- Filled Thermal Holes

Linlin Xu, Renli Liang, Jiangnan Dai, et al.
IEEE Transactions on Components, Packaging and Manufacturing Technology 8 (12) 2107 (2018)
https://doi.org/10.1109/TCPMT.2018.2812226