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Cited article:

Control of scanning beam interference lithography by real-time compensation of scan angle error through acousto-optic modulation and phase-shift grating interferometry for large area nanostructuring

Qi Zhou, Jongeun Oh, Donghyun Kim, Ika Oktavia Suryani, Runjia Han and Shinill Kang
Micro & Nano Manufacturing 2 (1) (2026)
https://doi.org/10.1007/s44374-025-00009-2