Design and Fabrication of Integrated Microchannel and Peristaltic Micropump System for Inertial Particle Separation

Utku Sönmez; Muhammed Bekin; Levent Trabzon

doi:10.1051/matecconf/201815308002

All issues

Volume 153 (2018)

MATEC Web Conf., 153 (2018) 08002

References

Open Access

Issue		MATEC Web Conf. Volume 153, 2018 The 4^th International Conference on Mechatronics and Mechanical Engineering (ICMME 2017)


Article Number		08002
Number of page(s)		6
Section		Industrial Engineering and Manufacturing Systems
DOI		https://doi.org/10.1051/matecconf/201815308002
Published online		26 February 2018

D J Laser and J G Santiago. ¨A review of micropumps,¨ J. Micromech. Microeng. 14, R35–R64, 2004. [CrossRef] [Google Scholar]
Nan-Chyuan Tsai, Chung-Yang Sue. ¨Review of MEMS-based drug delivery and dosing systems,¨ Sensors and Actuators A 134, 555–564, 2007. [CrossRef] [Google Scholar]
D. Xu, L. Wang, G. Ding, Y. Zhou, A. Yu, B. Cai. ¨Characteristics and fabrication of NiTi/Si diaphragm micropump,¨ Sensors and Actuators A: Phys. 93, 87–92, 2001. [CrossRef] [Google Scholar]
M. Koch, N. Harris, A.G.R. Evans, N.M. White, A. Brunnschweiler. ¨A novel micromachined pump based on thick-film piezoelectric actuation,¨ Sensors and Actuators A: Phys. 70, 98–103, 1998. [CrossRef] [Google Scholar]
S. Guo, T. Fukuda. ¨Development of the micro pump using ICPF actua-tor,¨ Proceedings of IEEE International Conference on Robotics and Automation, vol. 1, pp. 266–271, 1997. [CrossRef] [Google Scholar]
Insoo Leea, Pyohwan Hong, Chanseob Choa, Byeungleul Leec, Kyunghan Chund, Bonghwan Kimd. ¨Four-electrode micropump with peristaltic motion,¨ Sensors and Actuators. 245, 19–25, 2016. [CrossRef] [Google Scholar]
A.V. Lemoff, A.P. Lee. ¨An AC magnetohydrodynamic micropump,¨ Sensors and Actuators B: Chem., 63, 178–185, 2000. [CrossRef] [Google Scholar]
Zhou, J., Papautsky I. ¨Fundamentals of inertial focusing in microchannels, ¨ Lab on a Chip, 13, 1121-1132, 2013. [CrossRef] [Google Scholar]
G. Shuxiang, T. Fukuda. ¨SMA actuator based novel type of micropump for biomedical application, ¨ Proceedings of IEEE International Conference, vol. 2, pp. 1616–1621, 2004. [Google Scholar]
Yobas L., Tang K., Yong S., and Ong E. K. ¨A disposable planar peristaltic pump for lab-on-a-chip, ¨ Lab on a Chip, 8, 660–662, 2008. [CrossRef] [Google Scholar]
Bekin M., Say U., Ozer, A. ¨Polimer tabanlı kendinden tahrikli entegre mikroparçacık ayrıştırma sistemleri tasarımı, üretimi ve karakterizasyonu [Turkish],¨ B.S. Thesis, Dept. of Mechanical Engineering, Istanbul Technical University, Istanbul, Turkey, 2014. [Google Scholar]
Zhang X., Chen Z., Huang Y. ¨A valve-less peristaltic pumping method, ¨ Biomicrofluidics. 9, 014118, 2015. [CrossRef] [Google Scholar]
Sonmez U., Jaber S., Trabzon L. ¨ Investigation of superposition in microchannel geometry for inertial particle separation, ¨ Proceedings of SB3C International Conference, Maryland, USA, Vol. 1, pp. 1079-1080, June 2016. [Google Scholar]
Lee et. al. ¨PDMS Nanoslits without Roof Collapse, ¨ Bull. Korean Chem. Soc., Vol. 30, No. 8, 2009. [Google Scholar]
Huang et al. ¨Stamp collapse in soft lithography, ¨ Langmuir, 21, 8058- 8068, 2005. [CrossRef] [Google Scholar]
Du M., Ye X., Wu K., Zhou Z. ¨A peristaltic micro pump driven by a rotating motor with magnetically attracted steel balls, ¨ Sensors, 9, 2611- 2620, 2009. [CrossRef] [Google Scholar]

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[1] D J Laser and J G Santiago. ¨A review of micropumps,¨ J. Micromech. Microeng. 14, R35–R64, 2004. [CrossRef] [Google Scholar]

[2] Nan-Chyuan Tsai, Chung-Yang Sue. ¨Review of MEMS-based drug delivery and dosing systems,¨ Sensors and Actuators A 134, 555–564, 2007. [CrossRef] [Google Scholar]

[3] D. Xu, L. Wang, G. Ding, Y. Zhou, A. Yu, B. Cai. ¨Characteristics and fabrication of NiTi/Si diaphragm micropump,¨ Sensors and Actuators A: Phys. 93, 87–92, 2001. [CrossRef] [Google Scholar]

[4] M. Koch, N. Harris, A.G.R. Evans, N.M. White, A. Brunnschweiler. ¨A novel micromachined pump based on thick-film piezoelectric actuation,¨ Sensors and Actuators A: Phys. 70, 98–103, 1998. [CrossRef] [Google Scholar]

[5] S. Guo, T. Fukuda. ¨Development of the micro pump using ICPF actua-tor,¨ Proceedings of IEEE International Conference on Robotics and Automation, vol. 1, pp. 266–271, 1997. [CrossRef] [Google Scholar]

[6] Insoo Leea, Pyohwan Hong, Chanseob Choa, Byeungleul Leec, Kyunghan Chund, Bonghwan Kimd. ¨Four-electrode micropump with peristaltic motion,¨ Sensors and Actuators. 245, 19–25, 2016. [CrossRef] [Google Scholar]

[7] A.V. Lemoff, A.P. Lee. ¨An AC magnetohydrodynamic micropump,¨ Sensors and Actuators B: Chem., 63, 178–185, 2000. [CrossRef] [Google Scholar]

[8] Zhou, J., Papautsky I. ¨Fundamentals of inertial focusing in microchannels, ¨ Lab on a Chip, 13, 1121-1132, 2013. [CrossRef] [Google Scholar]

[9] G. Shuxiang, T. Fukuda. ¨SMA actuator based novel type of micropump for biomedical application, ¨ Proceedings of IEEE International Conference, vol. 2, pp. 1616–1621, 2004. [Google Scholar]

[10] Yobas L., Tang K., Yong S., and Ong E. K. ¨A disposable planar peristaltic pump for lab-on-a-chip, ¨ Lab on a Chip, 8, 660–662, 2008. [CrossRef] [Google Scholar]

[11] Bekin M., Say U., Ozer, A. ¨Polimer tabanlı kendinden tahrikli entegre mikroparçacık ayrıştırma sistemleri tasarımı, üretimi ve karakterizasyonu [Turkish],¨ B.S. Thesis, Dept. of Mechanical Engineering, Istanbul Technical University, Istanbul, Turkey, 2014. [Google Scholar]

[12] Zhang X., Chen Z., Huang Y. ¨A valve-less peristaltic pumping method, ¨ Biomicrofluidics. 9, 014118, 2015. [CrossRef] [Google Scholar]

[13] Sonmez U., Jaber S., Trabzon L. ¨ Investigation of superposition in microchannel geometry for inertial particle separation, ¨ Proceedings of SB3C International Conference, Maryland, USA, Vol. 1, pp. 1079-1080, June 2016. [Google Scholar]

[14] Lee et. al. ¨PDMS Nanoslits without Roof Collapse, ¨ Bull. Korean Chem. Soc., Vol. 30, No. 8, 2009. [Google Scholar]

[15] Huang et al. ¨Stamp collapse in soft lithography, ¨ Langmuir, 21, 8058- 8068, 2005. [CrossRef] [Google Scholar]

[16] Du M., Ye X., Wu K., Zhou Z. ¨A peristaltic micro pump driven by a rotating motor with magnetically attracted steel balls, ¨ Sensors, 9, 2611- 2620, 2009. [CrossRef] [Google Scholar]