Design and Fabrication of Integrated Microchannel and Peristaltic Micropump System for Inertial Particle Separation

Utku Sönmez; Muhammed Bekin; Levent Trabzon

doi:10.1051/matecconf/201815308002

All issues

Volume 153 (2018)

MATEC Web Conf., 153 (2018) 08002

References

Open Access

Issue		MATEC Web Conf. Volume 153, 2018 The 4^th International Conference on Mechatronics and Mechanical Engineering (ICMME 2017)


Article Number		08002
Number of page(s)		6
Section		Industrial Engineering and Manufacturing Systems
DOI		https://doi.org/10.1051/matecconf/201815308002
Published online		26 February 2018

D J Laser and J G Santiago. ¨A review of micropumps,¨ J. Micromech. Microeng. 14, R35–R64, 2004. [Google Scholar]
Nan-Chyuan Tsai, Chung-Yang Sue. ¨Review of MEMS-based drug delivery and dosing systems,¨ Sensors and Actuators A 134, 555–564, 2007. [CrossRef] [Google Scholar]
D. Xu, L. Wang, G. Ding, Y. Zhou, A. Yu, B. Cai. ¨Characteristics and fabrication of NiTi/Si diaphragm micropump,¨ Sensors and Actuators A: Phys. 93, 87–92, 2001. [CrossRef] [Google Scholar]
M. Koch, N. Harris, A.G.R. Evans, N.M. White, A. Brunnschweiler. ¨A novel micromachined pump based on thick-film piezoelectric actuation,¨ Sensors and Actuators A: Phys. 70, 98–103, 1998. [CrossRef] [Google Scholar]
S. Guo, T. Fukuda. ¨Development of the micro pump using ICPF actua-tor,¨ Proceedings of IEEE International Conference on Robotics and Automation, vol. 1, pp. 266–271, 1997. [CrossRef] [Google Scholar]
Insoo Leea, Pyohwan Hong, Chanseob Choa, Byeungleul Leec, Kyunghan Chund, Bonghwan Kimd. ¨Four-electrode micropump with peristaltic motion,¨ Sensors and Actuators. 245, 19–25, 2016. [CrossRef] [Google Scholar]
A.V. Lemoff, A.P. Lee. ¨An AC magnetohydrodynamic micropump,¨ Sensors and Actuators B: Chem., 63, 178–185, 2000. [CrossRef] [Google Scholar]
Zhou, J., Papautsky I. ¨Fundamentals of inertial focusing in microchannels, ¨ Lab on a Chip, 13, 1121-1132, 2013. [CrossRef] [Google Scholar]
G. Shuxiang, T. Fukuda. ¨SMA actuator based novel type of micropump for biomedical application, ¨ Proceedings of IEEE International Conference, vol. 2, pp. 1616–1621, 2004. [Google Scholar]
Yobas L., Tang K., Yong S., and Ong E. K. ¨A disposable planar peristaltic pump for lab-on-a-chip, ¨ Lab on a Chip, 8, 660–662, 2008. [CrossRef] [Google Scholar]
Bekin M., Say U., Ozer, A. ¨Polimer tabanlı kendinden tahrikli entegre mikroparçacık ayrıştırma sistemleri tasarımı, üretimi ve karakterizasyonu [Turkish],¨ B.S. Thesis, Dept. of Mechanical Engineering, Istanbul Technical University, Istanbul, Turkey, 2014. [Google Scholar]
Zhang X., Chen Z., Huang Y. ¨A valve-less peristaltic pumping method, ¨ Biomicrofluidics. 9, 014118, 2015. [CrossRef] [Google Scholar]
Sonmez U., Jaber S., Trabzon L. ¨ Investigation of superposition in microchannel geometry for inertial particle separation, ¨ Proceedings of SB3C International Conference, Maryland, USA, Vol. 1, pp. 1079-1080, June 2016. [Google Scholar]
Lee et. al. ¨PDMS Nanoslits without Roof Collapse, ¨ Bull. Korean Chem. Soc., Vol. 30, No. 8, 2009. [Google Scholar]
Huang et al. ¨Stamp collapse in soft lithography, ¨ Langmuir, 21, 8058- 8068, 2005. [CrossRef] [Google Scholar]
Du M., Ye X., Wu K., Zhou Z. ¨A peristaltic micro pump driven by a rotating motor with magnetically attracted steel balls, ¨ Sensors, 9, 2611- 2620, 2009. [CrossRef] [Google Scholar]

Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.

Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.

Initial download of the metrics may take a while.

[1] D J Laser and J G Santiago. ¨A review of micropumps,¨ J. Micromech. Microeng. 14, R35–R64, 2004. [Google Scholar]

[2] Nan-Chyuan Tsai, Chung-Yang Sue. ¨Review of MEMS-based drug delivery and dosing systems,¨ Sensors and Actuators A 134, 555–564, 2007. [CrossRef] [Google Scholar]

[3] D. Xu, L. Wang, G. Ding, Y. Zhou, A. Yu, B. Cai. ¨Characteristics and fabrication of NiTi/Si diaphragm micropump,¨ Sensors and Actuators A: Phys. 93, 87–92, 2001. [CrossRef] [Google Scholar]

[4] M. Koch, N. Harris, A.G.R. Evans, N.M. White, A. Brunnschweiler. ¨A novel micromachined pump based on thick-film piezoelectric actuation,¨ Sensors and Actuators A: Phys. 70, 98–103, 1998. [CrossRef] [Google Scholar]

[5] S. Guo, T. Fukuda. ¨Development of the micro pump using ICPF actua-tor,¨ Proceedings of IEEE International Conference on Robotics and Automation, vol. 1, pp. 266–271, 1997. [CrossRef] [Google Scholar]

[6] Insoo Leea, Pyohwan Hong, Chanseob Choa, Byeungleul Leec, Kyunghan Chund, Bonghwan Kimd. ¨Four-electrode micropump with peristaltic motion,¨ Sensors and Actuators. 245, 19–25, 2016. [CrossRef] [Google Scholar]

[7] A.V. Lemoff, A.P. Lee. ¨An AC magnetohydrodynamic micropump,¨ Sensors and Actuators B: Chem., 63, 178–185, 2000. [CrossRef] [Google Scholar]

[8] Zhou, J., Papautsky I. ¨Fundamentals of inertial focusing in microchannels, ¨ Lab on a Chip, 13, 1121-1132, 2013. [CrossRef] [Google Scholar]

[9] G. Shuxiang, T. Fukuda. ¨SMA actuator based novel type of micropump for biomedical application, ¨ Proceedings of IEEE International Conference, vol. 2, pp. 1616–1621, 2004. [Google Scholar]

[10] Yobas L., Tang K., Yong S., and Ong E. K. ¨A disposable planar peristaltic pump for lab-on-a-chip, ¨ Lab on a Chip, 8, 660–662, 2008. [CrossRef] [Google Scholar]

[11] Bekin M., Say U., Ozer, A. ¨Polimer tabanlı kendinden tahrikli entegre mikroparçacık ayrıştırma sistemleri tasarımı, üretimi ve karakterizasyonu [Turkish],¨ B.S. Thesis, Dept. of Mechanical Engineering, Istanbul Technical University, Istanbul, Turkey, 2014. [Google Scholar]

[12] Zhang X., Chen Z., Huang Y. ¨A valve-less peristaltic pumping method, ¨ Biomicrofluidics. 9, 014118, 2015. [CrossRef] [Google Scholar]

[13] Sonmez U., Jaber S., Trabzon L. ¨ Investigation of superposition in microchannel geometry for inertial particle separation, ¨ Proceedings of SB3C International Conference, Maryland, USA, Vol. 1, pp. 1079-1080, June 2016. [Google Scholar]

[14] Lee et. al. ¨PDMS Nanoslits without Roof Collapse, ¨ Bull. Korean Chem. Soc., Vol. 30, No. 8, 2009. [Google Scholar]

[15] Huang et al. ¨Stamp collapse in soft lithography, ¨ Langmuir, 21, 8058- 8068, 2005. [CrossRef] [Google Scholar]

[16] Du M., Ye X., Wu K., Zhou Z. ¨A peristaltic micro pump driven by a rotating motor with magnetically attracted steel balls, ¨ Sensors, 9, 2611- 2620, 2009. [CrossRef] [Google Scholar]