Open Access
| Issue |
MATEC Web of Conferences
Volume 39, 2016
2015 2nd International Conference on Chemical and Material Engineering (ICCME 2015)
|
|
|---|---|---|
| Article Number | 01010 | |
| Number of page(s) | 3 | |
| Section | Novel materials and properties | |
| DOI | https://doi.org/10.1051/matecconf/20163901010 | |
| Published online | 13 January 2016 | |
- H. Wakabayashi, Y. Saito, K. Takeuchi, T. Mogami, and T. Kunio, IEDM Tech. Dig. 1999, 253 (1999), doi:10.1109/IEDM.1999.823891. [Google Scholar]
- C.-Y. Kang, R. Choi, M.M. Hussain, J. Wang, J.S. Young, H.C. Floresca, M.J. Kim, J. Kim, B.-H. Lee, and R. Jammy, Appl. Phy. Lett. 91, 033511 (2007), doi:10.1063/1.2766667. [CrossRef] [Google Scholar]
- K. H. Yeo, S.-D. Suk, M. Li, Y.-Y. Yeoh, K. H. Cho, K.-H. Hong, S. K. Yun, M. S. Lee, N. Cho, K. Lee, D. Hwang, B. Park, D.-W. Kim, D. Park, B.-I. Ryu, IEDM Tech. Dig. 2006, 1 (2006), doi:10.1109/IEDM.2006.346838. [Google Scholar]
- K.-E. Elers, V. Saanila, P. J. Soininen, W.-M. Li, J. T. Kostamo, S. Haukka, J. Juhanoja, and W. F. A. Besling, Chem. Vap. Deposition 8, 149 (2002). [CrossRef] [Google Scholar]
- W.-M. Li, Chem. Vap. Deposition 19, 82 (2013), doi:10.1002/cvde.201300052. [CrossRef] [Google Scholar]
- K.-E. Elers, J.Winkler, K. Weeks, and S. Marcus, J. Electrochem. Soc. 152, G589 (2005), doi:10.1149/1.1938108. [CrossRef] [Google Scholar]
- K.-E. Elers, T. Blomberg, M. Peussa, B. Aitchison, S. Haukka, and S. Marcus, Chem. Vap. Deposition 12, 13 (2006), doi:10.1002/cvde.200500024. [Google Scholar]
- G. Cho and S.W. Rhee, J. Vac. Sci. Technol. A 31, 01A117 (2013), doi:10.1116/1.4764898. [CrossRef] [Google Scholar]
- P. Caubet, T. Blomberg, R. Benaboud, C. Wyon, E. Blanquet, J.-P. Gonchond, M. Juhel, P. Bouvet, M. Gros-Jean, J. Michailos, C. Richard, and B. Iteprat, J. Electrochem. Soc. 155, H625 (2008), doi:10.1149/1.2940306. [CrossRef] [Google Scholar]
- J.Y. Kim, G.H. Choi, Y.D. Kim, Y. Kim, and H. Jeon, Jpn. J. Appl. Phys. 42, 4245 (2003), doi: 10.1143/JJAP.42.4245. [CrossRef] [Google Scholar]
- W.-M Li, X. Li, T. Pilvi, E. Østreng, C. Dezelah, Z.X. Chen, and G.-Q. Lo, ALD 2014, 99 (2014). [Google Scholar]
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.