| Issue |
MATEC Web of Conferences
Volume 39, 2016
2015 2nd International Conference on Chemical and Material Engineering (ICCME 2015)
|
|
|---|---|---|
| Article Number | 01010 | |
| Number of page(s) | 3 | |
| Section | Novel materials and properties | |
| DOI | https://doi.org/10.1051/matecconf/20163901010 | |
| Published online | 13 January 2016 | |
Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Organic Precursor Tetrakis(ethylmethylamido)Titanium (TEMAT)
1 Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 11 Science Park Road, Singapore Science Park II, Singapore 117685
2 Picosun Asia Pte. Ltd., 1 North Bridge Road, #12-01 High Street Centre, Singapore 179094
3 Picosun Oy, Masalantie 365, 02430 Masala, Finland
a Corresponding author: chenzx@ime.a-star.edu.sg
This paper presents the plasma-enhanced atomic layer deposition (PEALD) of titanium nitride (TiN) using the organic precursor tetrakis(ethylmethylamido)titanium (TEMAT), with remote ammonia (NH3) plasma as reactant gas. This work investigates the impact of substrate temperature, from 150-350°C, and plasma times, from 5-30s, on deposition rate, resistivity, carbon content, N/Ti ratio and film density. The lowest resistivity of ~ 250 μΩ.cm was achieved at substrate temperatures 300-350°C and plasma time of 20s. At low substrate temperatures, although deposition was possible, carbon concentration was found to be higher, which thus affects film resistivity and density.
© Owned by the authors, published by EDP Sciences, 2016
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.