Open Access
Issue |
MATEC Web of Conferences
Volume 32, 2015
International Symposium of Optomechatronics Technology (ISOT 2015)
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Article Number | 01001 | |
Number of page(s) | 5 | |
Section | MOEMS | |
DOI | https://doi.org/10.1051/matecconf/20153201001 | |
Published online | 02 December 2015 |
- Richter, S., Stutz, M., Gratzke, A., Schleitzer, Y., Krampert, G., “Position sensing and tracking with quasistatic MEMS mirrors”, Proc. SPIE 8616, MOEMS and Miniaturized Systems XII, 86160D (2013) [Google Scholar]
- Cagdaser, B., Jog, A., Last, M., Leibowitz, B. S., Zhou, L., Shelton, E., Pister, K. S. J., Boser, B. E., “Capacitive sense feedback control for MEMS beam steering mirrors,” Proc. of Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, USA, June 6-10, 348–351 (2004). [Google Scholar]
- Zhang, C., Zhang, G., You, Z. A, “Two-Dimensional Micro Scanner Integrated with a Piezoelectric Actuator and Piezoresistors”, Sensors, 9, p. 631–644 (2009). [CrossRef] [Google Scholar]
- Ataman, C., Lani, S., Noell, W. and de Rooij, N., “A dual-axis pointing mirror with moving-magnet actuation”, J. Micromech. Microeng. 23 (2013) [Google Scholar]
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