Open Access
Issue
MATEC Web of Conferences
Volume 8, 2013
Progress in Ultrafast Laser Modifications of Materials
Article Number 04011
Number of page(s) 2
Section Process characterization and some aspects of femtosecond laser direct writing
DOI https://doi.org/10.1051/matecconf/20130804011
Published online 18 November 2013
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  4. David J. Hwang, P. Grigoropoulos and Tae Y. Choi, “ Efficiency of silicon micromachining by femtosecond laser pulses Efficiency of silicon micromachining by femtosecond laser pulses in ambient air”, J. Appl. Phys 99, 083101 (2006). [CrossRef]
  5. D. Hulin, M. Combescot, J. Bok, A.Migus, J. Y. Vinet and A. Antonetti,“Energy transfer during silicon irradiation by femtosecond laser pulse”, Phy. Rev. Lett. 52, 1998 (1984) [CrossRef]
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