| Issue |
MATEC Web Conf.
Volume 401, 2024
21st International Conference on Manufacturing Research (ICMR2024)
|
|
|---|---|---|
| Article Number | 08007 | |
| Number of page(s) | 6 | |
| Section | Sensors, Control, Robotics and Automation | |
| DOI | https://doi.org/10.1051/matecconf/202440108007 | |
| Published online | 27 August 2024 | |
Error Analysis of the plate beamsplitter in near optical coaxial phase measurement deflectometry
1 School of Mechanical Engineering, Hebei University of Technology, Tianjin 300130, China
2 EPSRC Future Metrology Hub, University of Huddersfield, Huddersfield, HD1 3DH
* Corresponding author: Y.Li@hud.ac.uk
Phase-measuring deflectometry (PMD) is a key measurement technology for specular surfaces form measurement. Compared with the phase measuring deflectometry techniques based on the conventional configuration, the near optical coaxial phase measuring deflectometry (NCPMD) can achieve compact configuration, light weight and insignificant measurement error caused by structure shadows by utilizing a plate beamsplitter. However, the introduction of the plate beamsplitter will make some influence of the measurement accuracy of the NCPMD system. In the one hand, the introduction of the plate beamsplitter can reduce the measurement accuracy of the NCPMD system due to the refractive of the ray between the two surfaces of the beamsplitter. In the other hand, due to the processing and manufacturing problems of the beamsplitter, there are inevitably certain unevenness errors on the upper and lower surfaces. In this paper, a virtual simulation system of NCPMD is established, and an error model of the NCPMD system by considering both the refraction influence and reflection influence of the plate beamsplitter is presented to analyse the shape reconstruction error caused by the plate beamsplitter.
© The Authors, published by EDP Sciences, 2024
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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