Improvement of current crowding effect in VCSEL arrays with non-uniform oxidation aperture design

¹ Institute of Microelectronics, Faculty of Information Technology, Beijing University of Technology, Beijing 100124, China
² Institute of Advanced Technology on Semiconductor Optics & Electronics, Institute of Laser, Engineering, Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing 100124, China

^* Corresponding author: dyjin@bjut.edu.cn

Abstract

A compact electro-opto-thermal model of 2-D vertical cavity surface emitting laser (VCSEL) arrays considering the current crowding effect in each array cell is established to study the impact of oxidation aperture on the device performance. Simulated results shows that increasing oxidation aperture of array cell is helpful to improve the uniformity of current density distribution. With careful design of non-uniform oxidation aperture layout, both the uniformity of the temperature distribution and the current distribution is improved by 36.52% and 42.08%, respectively. Furthermore, 3×3 VCSEL arrays with uniform oxidation aperture (array-1) and non-uniform oxidation aperture (array-2) are fabricated and the L-I-V curves of two types of VCSEL arrays at different biases are also measured. The peak output optical power of array-2 is enhanced to 1.83mW with an improvement of 8.91% when compared with that of array-1. Moreover, the total optical output power of array-2 is always superior to that of array-1 over a wide bias current range.