| Issue |
MATEC Web Conf.
Volume 355, 2022
2021 International Conference on Physics, Computing and Mathematical (ICPCM2021)
|
|
|---|---|---|
| Article Number | 01026 | |
| Number of page(s) | 7 | |
| Section | Investigation in Physics and Materials | |
| DOI | https://doi.org/10.1051/matecconf/202235501026 | |
| Published online | 12 January 2022 | |
Research on material selection of force-sensitive element for high-frequency dynamic piezoelectric pressure sensor
School of Mechanical Engineering, University of Jinan, Jinan, China
* Corresponding author: me_wanggc@ujn.edu.cn
The high-frequency dynamic piezoelectric pressure sensor has the advantages of simple structure, long service life, high natural frequency, excellent signal-to-noise ratio and great sensitivity. It is appropriate for measuring high dynamic, dynamic or quasi-static pressure changes and pressure fluctuations. And this kind of sensor is widely utilized in the shock wave testing. The force-sensitive element is one of the main factors affecting the static and dynamic performance of piezoelectric pressure sensors. Basing on the piezoelectric equation and coupling effect between mechanics and electricity, in this paper, the finite element model of the high-frequency dynamic piezoelectric pressure sensor is established. The influences of the force-sensing element on the sensitivity of the sensor are analysed. Referential suggestions for choosing force-sensitive element of high-frequency dynamic piezoelectric pressure sensor are provided.
Key words: Pressure sensor / Piezoelectric ceramics / High-frequency dynamic measure / Charge sensitivity
© The Authors, published by EDP Sciences, 2022
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