| Issue |
MATEC Web Conf.
Volume 298, 2019
International Conference on Modern Trends in Manufacturing Technologies and Equipment: Mechanical Engineering and Materials Science (ICMTMTE 2019)
|
|
|---|---|---|
| Article Number | 00088 | |
| Number of page(s) | 6 | |
| DOI | https://doi.org/10.1051/matecconf/201929800088 | |
| Published online | 18 November 2019 | |
Formation of Cr-Zr gradient layer by magnetron sputtering and ion mixing
National Research Tomsk Polytechnic University, 30 av. Lenin, Tomsk, 634050, Russia
* Corresponding author: egor_kashkarov@mail.ru
The gradient Cr-Zr layer was formed onto Zr-1Nb substrate by magnetron sputtering of chromium and zirconium targets and ion mixing (Ar+ with 25 keV). The distribution of Cr and Zr elements in the deposited coatings was measured by using a glow discharge optical emission spectroscopy. The optimal ion fluence onto the substrate was 8×1019 ion/m2. At higher ion dose, the intensive sputtering of the deposited coating was observed.
© The Authors, published by EDP Sciences, 2019
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