MATEC Web Conf.
Volume 281, 2019International Conference of Engineering Risk (INCER 2019)
|Number of page(s)||8|
|Section||Civil Infrastructures: Bridges, Structures, Dams|
|Published online||21 May 2019|
Lithium Niobate Micro-transducers matrix design
1 UPHF, CNRS, Univ. Lille, YNCREA, Centrale Lille, UMR 8520 –IEMN, DOAE, F-59313, Valenciennes, France
2 Université Libanaise, Faculté des Sciences II, Laboratoire de Physique Appliquée, Fanar, Liban
* Corresponding author: Hala.ElRammouz@etu.uphf.fr
In this work, a two-dimensional (2D) Lithium Niobate (LiNbO3) 36°Y-cut micro-transducers (μTs) matrix design is presented. Two main steps define the fabrication process: electrode deposition and photolithography. These steps are preceded by the optical mask conception, which defines the 2D matrix pattern. In contrary to the one element case, this μTs matrix allows to automatically scan a desired structure in real time. The μTs matrix is characterized using an impedance analyzer. Furthermore, the experimental tests carried out in order to demonstrate the matrix functionality at low frequencies [200 - 800] kHz are presented.
© The Authors, published by EDP Sciences, 2019
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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