| Issue |
MATEC Web Conf.
Volume 207, 2018
International Conference on Metal Material Processes and Manufacturing (ICMMPM 2018)
|
|
|---|---|---|
| Article Number | 04003 | |
| Number of page(s) | 4 | |
| Section | Thermal Engineering | |
| DOI | https://doi.org/10.1051/matecconf/201820704003 | |
| Published online | 18 September 2018 | |
Laser Micromilling Technology as a Key for Rapid Prototyping SMD ceramic MEMS devices
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), 115409, Kasirskoe highway 31, Moscow, Russia
a Corresponding author: nnsamotaev@mephi.ru
The flexible laser micromilling technology for ceramic MEMS producing of microhotplate in the surface mounted device (SMD) package for the metal oxide (MOX) gas sensors is describing. There are discusses technological and economic aspects of small-scale production of gas MOX sensors in comparison with classical clean room technologies using for mass production MEMS devices. The main technical factors affecting on using MOX sensors in various applications are presented. Current results demonstrate that using described technology possible to manufacturing all parts of MOX gas sensor in the SMD form-factor SOT-23 package type.
© The Authors, published by EDP Sciences, 2018
This is an open access article distributed under the terms of the Creative Commons Attribution License 4.0 (http://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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