A Study on Laser Micromachining

Department of Mechanical Engineering, Jeju National University, Jeju, South Korea

^a Professor Dong-Won Jung, Department of Mechanical Engineering, Jeju National University, Jeju, Republic of Korea : jdwcheju@jejunu.ac.kr

Abstract

Ultra Violet (UV) pulse are widely used for micromachining in the research and development of Information Technology (IT), Nano Technology (NT), and Bio Technology (BT) products because due to short wavelength of the laser it not only allows micro drilling, micro cutting and micro grooving with high accuracy, but acts also as high penetrating coefficient, which give opportunity for different materials to machined properly. A finite element model considering photo-thermal and photomechanical properties was recommended to study the micro phenomena subject by mechanical pressure impacts and thermal heat transfers during a very short processing time. From the results of this research work, few of dynamic deformation behaviours such as deformation shape, strain, and stress distributions were examine and compare it with the experimental results of previous research work. The results from this comparison will help to know better knowledge about interference of UV laser beam and metal materials.