MATEC Web Conf.
Volume 160, 2018International Conference on Electrical Engineering, Control and Robotics (EECR 2018)
|Number of page(s)||5|
|Section||Electronic and Electrical Engineering|
|Published online||09 April 2018|
Full Wave Simulation and Design of Film Bulk Acoustic Wave Filters
State Key Lab.of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, 610054 Chengdu, China
2 26th Institude of China Electronics Technology Group Corporation, 400060 Chongqing, China
In order to simulate the frequency response of thin film bulk acoustic wave filter accurately, the MBVD model of film bulk acoustic wave filter chip and three dimension electro-magnetic model of package were respectively established. And then, the collaborative simulation of acoustic and electro-magnetic components was realized in ADS software. Finally, thin film bulk acoustic wave filter with working frequency of 2.825GHz and 5.6 GHz were designed and fabricated by this method. Insertion loss of 2.825GHz FBAR filter is less than 1.5dB, and rejection is more than 40dB. Insertion loss of 5.6GHz FBAR filter is less than 1.7dB, and rejection is more than 30dB. The simulation and experimental results show that the proposed method has good design precision and can simulate the influence of package on the performance of the filter accurately.
© The Authors, published by EDP Sciences, 2018
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (http://creativecommons.org/licenses/by/4.0/).
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