MATEC Web Conf.
Volume 153, 2018The 4th International Conference on Mechatronics and Mechanical Engineering (ICMME 2017)
|Number of page(s)||5|
|Section||Researching and Designing of Machines and Mechanisms|
|Published online||26 February 2018|
Measurement of six degree bi-directional motion error of linear stage
Tokyo Denki University, School of Engineering, Senju-Asahi 5, Adachi, 120-8551 Tokyo, Japan
We proposed the measurement system of the six degree of motion errors which is based on distance measurement by the laser interferometer. The system has six parallel laser beams and six ball lenses as the retroreflectors on the linear stage, which reflect the corresponding laser beams. In the proposed system, the error of axial direction is measured with the ordinary distance measurement method by laser interferometer. The vertical errors to the axial direction and the roll errors around the optical axis are measured by tilted beams using the wedge prism. The pitch and yaw errors in the vertical plane to the optical axis are measured by the difference between distance of two ball lenses. The former system can measure the displacement and the error angle in one-direction. The propose system are expanded and bi-directional displacement and error angle can be measured. In this paper, it is shown how to expand the measurement system. As a result, the maximum displacement errors in x, y and z directions are 242nm, 179nm and 90nm. The maximum rotational errors around x, y, z axes are 1.75 arcsec, 2.35 arcsec and 1.67 arcsec.
© The Authors, published by EDP Sciences, 2018
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (http://creativecommons.org/licenses/by/4.0/).
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