MATEC Web Conf.
Volume 249, 20182018 5th International Conference on Mechanical, Materials and Manufacturing (ICMMM 2018)
|Number of page(s)||6|
|Section||Functional Material Design and Development|
|Published online||10 December 2018|
Titanium-based thin films for protective coatings prepared by TVA (Thermionic Vacuum Arc) technology
Ovidius University, Mamaia 124, Constanţa, 900527, Romania
The aim of the present work is to achieve the controlled synthesis of Ti and Mg thin films, with compact structure and extremely smooth surface, by using the Thermionic Vacuum Arc (TVA) technology, from elemental powder of titanium and magnesium. The thin film exhibits an amorphous structure, with polycrystalline grain mainly being Mg hexagonal phase and small amount of hexagonal Ti. Grain mean size was estimated to be ~120nm by statistical analysis of measured Feret diameter of projected area of grain. The phases were tested by mean of Cohen method applied to electron diffraction results. No oxide (MgO, TiO2,) lines could be identified from electron diffraction. Debye-Scherrer dimension, estimated from electron diffraction profile is ~4 nm. The analysis of amorphous part from diffraction profile show different coordination number for Mg and Ti atoms.
© The Authors, published by EDP Sciences, 2018
This is an Open Access article distributed under the terms of the Creative Commons Attribution License 4.0, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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