MATEC Web Conf.
Volume 95, 20172016 the 3rd International Conference on Mechatronics and Mechanical Engineering (ICMME 2016)
|Number of page(s)||4|
|Section||Materials Handling Methods and Performance Analysis|
|Published online||09 February 2017|
The Effect of Growth Temperature and V/III Flux Ratio of MOCVD Antimony Based Semiconductors on Growth Rate and Surface Morphology
1 Physics Department, Faculty of Mathematics and Natural Sciences, Sebelas Maret University, Jl. Ir. Sutami No, 36A Surakarta, Indonesia
2 Chemistry Department, Faculty of Mathematics and Natural Sciences, Sebelas Maret University, Jl. Ir. Sutami No, 36A Surakarta, Indonesia
3 Physics Department, Macquarie University, Sydney NSW 2109, Australia
Epitaxial Alx Ga1-x Sb layers on GaSb and GaAs substrates have been grown by atmospheric pressure metalorganic chemical vapor deposition using TMAl, TMGa and TMSb. Nomarski microscope and a profiler were employed to examine the surface morphology and growth rate of the samples. We report the effect of growth temperature and V/III flux ratio on growth rate and surface morphology. Growth temperatures in the range of 520°C and 680°C and V/III ratios from 1 to 5 have been investigated. A growth rate activation energy of 0.73 eV was found. At low growth temperatures between 520 and 540°C, the surface morphology is poor due to antimonide precipitates associated with incomplete decomposition of the TMSb. For layers grown on GaAs at 580°C and 600°C with a V/III ratio of 3 a high quality surface morphology is typical, with a mirror-like surface and good composition control. It was found that a suitable growth temperature and V/III flux ratio was beneficial for producing good AlGaSb layers. Undoped AlGaSb grown at 580°C with a V/III flux ratio of 3 at the rate of 3.5 μm/hour shows p-type conductivity with smooth surface morphology
© The Authors, published by EDP Sciences, 2017
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