MATEC Web Conf.
Volume 75, 20162016 International Conference on Measurement Instrumentation and Electronics (ICMIE 2016)
|Number of page(s)||5|
|Section||Electronic Instruments and Measurement Technology|
|Published online||01 September 2016|
An Approach of Electronic Subdividing Method for Measuring Straightness and Displacement of a Precision Linear Stage Simultaneously
1 Department of Industrial Upgrading Service, Metal Industries Research & Development Centre, Kaohsiung, Taiwan
2 Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan
Optical encoders are commonly used in modern positioning systems. The accuracy and resolution of the optical encoders are always restricted by generated sinusoidal signals and the assembly technique. In this study, an electronic signal subdividing system is developed. This system is based on FPGA in combination with A/D and D/A converting circuits. Subdividing algorithm improves the segmenting signal amplitude method. Furthermore, we also construct a laser encoder for measuring straightness error and displacement of a linear stage simultaneously. The laser encoder consisting of the stainless steel bar and the sensor are developed for two-axis (X- and Z-axis) position measurement. The two dimensional sinusoidal array on the stainless steel bar are machined by ultrasonic elliptical vibration cutting system. The stainless steel bar has a three dimensional micro-structured surface, which is a superposition of periodic sinusoidal waves in the X- and Z-directions with spatial wavelengths of 350 µm and amplitudes of 0.5 µm. The laser-based two-axis position sensor is used to detect local slope profiles of the grid surface, and the displacement and straightness error could be extracted from the X- and Z-axis sensing signal. The sensing signal is processed by FPGA subdividing system. In addition, the proposed subdividing method is verified by the performances and effects of measuring results.
© The Authors, published by EDP Sciences, 2016
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